Modular Conveyor System • Production Automation • Assembly and Logistics Solutions • Robust Workpiece Carriers • Scalable Transfer Lines • Efficient Material Flow
2BV series liquid ring vacuum pumps are suitable for pumping the gases and steam. Its suction pressure canreach 33mbar (abs) (i.e. 97 % vacuum degree).
lf the transformer oil is used as the operating liquid, these pumpsare called oil ring...
AURION offers multi chamber systems with substrate handling under vacuum taylored to your needs. Available configurations include load lock chambers, transfer chambers and process module...
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